Comparison of Nd Doping Effect on SrTiO3 Thin Films Grown by PLD and CSD on LaAlO3 Substrate

SrTiO3:Nd (0, 1 and 4%) thin films were prepared by pulsed laser deposition and chemical solution deposition techniques on (100) LaAlO3 single crystal substrates. The influence of neodymium amount as well as the influence of the deposition method on the structural and microstructural properties of the films was evaluated. All of the films are (h00) oriented and present high quality epitaxial growth. A higher short-range disorder occurs for the 4% Nd-doped films obtained by chemical solution deposition, evidenced by the presence of the TO2, LO2 and LO4 first-order Raman modes and by an increase in the intensity of the photo luminescent spectrum. A greater effect of doping is also observed on the microstructure of this film.