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2000
Volume 19, Issue 8
  • ISSN: 1872-2121
  • E-ISSN: 2212-4047

Abstract

Atmospheric plasma polishing technology is an essential technology in the nanoscale machining needs of aerospace, astronomical telescopes, and other related fields and is an important means to expand ultra-precision machining technology in the future. However, in the research of surface cleaning, cost, equipment, ., there are still some technologies that need to be broken through in order to better use plasma polishing technology in the future. Through the introduction and discussion of the patent characteristics of plasma polishing in recent years, some valuable conclusions are summarized, and future research and development are prospected. The patents of plasma polishing were studied, and the patent and research progress of plasma polishing were summarized. With the development of ultra-precision machining technology, plasma polishing technology has become more and more important. Therefore, plasma polishing technology is needed to achieve low-cost and high-efficiency processing of ultra-precision materials. The importance of plasma polishing technology is discussed by describing its working characteristics. By comparing these patents, it is concluded that atmospheric plasma polishing technology is the main development trend of ultra-precision machining technology in the future.

This is an open access article published under CC BY 4.0 https://creativecommons.org/licenses/by/4.0/legalcode
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References

  1. YuanY. HuiL. XieP. Influence of process parameters on electrolytic plasma polishing of 316l parts for laser selective melting.Electroplating and Finishing20194303758310.19289/j.1004‑227x.2024.03.009
    [Google Scholar]
  2. WangC. ZiminT.A.N.G. FengD. Plasma polishing of zirconium based amorphous alloy electrolyte and treatment of waste liquid.China Surface Engineering20243701267279
    [Google Scholar]
  3. SunX.-H. LiJ.-H. WeiZ. Silicon carbide materials in chemical mechanical polishing to uniformity unless research progress.J. Artif. Cryst20244585599
    [Google Scholar]
  4. CongB. LinG. WanshengZ.H.A.O. Study on electrolyte plasma polishing process of additive manufacturing inconel 718.Electromachining and Mold2023065863
    [Google Scholar]
  5. JiG. SunH. DuanH. Annealing effect on plasma electrolyte polishing of stainless steel 304 .J. Mech. Des. Manuf2024412813210.19356/j.carolcarrollnki.1001‑3997.20231017.032
    [Google Scholar]
  6. ZhaiZ. LiuF. JiaG. Monocrystalline silicon removal mechanisms of plasma discharge study .J. Mech. Strength202351090109510.16579/j.iSSN1001.9669.2023.05.011
    [Google Scholar]
  7. XieS. LiangW. YaoJ. Research progress on laser polishing surface by numerical simulation .Materials protection20235610425510.16577/j.iSSN.1001‑1560.2023.0234
    [Google Scholar]
  8. XieMingLi. Based on the permanent magnet array planar magnetic rheological polishing method research .Yanshan University2023
    [Google Scholar]
  9. ZhangC. Simulation and experimental study of ultrasonic-assisted shear thickening polishing of cemented carbide.J. Manuf. Processes202310210611810.1016/j.jmapro.2023.07.042
    [Google Scholar]
  10. SongZ.R. Research on key technology of free radical plasma processing of monocrystalline silicon components.Xi'an University of technology202310.27391/,dcnki.Gxagu.2023.000334
    [Google Scholar]
  11. Peng Yueu Plasma processing technology and optical element characteristics migration law research .Xi'an University of Technology202310.27391/,dcnki.Gxagu.2023.000412
    [Google Scholar]
  12. Photonic crystal fiber sensor based on surface plasmon resonance research .Jinan University10.27166/,dcNki.GSDCC.2023.0009042023
    [Google Scholar]
  13. ZouY. WangS. ChenG. Study on plasma electrolytic polishing of 304 Steel and its Surface Structural properties.Surface technology2023526516010.16490/j.carolcarrollnki.Issn1001‑3660.2023.06.005
    [Google Scholar]
  14. ZhaoX. ZhongwenO.U. MoJ. Processing Method of Ultra-smooth Surfaces China Surface Engineering Association Electroplating Branch, Chongqing Science and Technology Association.Proceedings of the 12th National Surface Engineering2014
    [Google Scholar]
  15. YuanC. Research on Non-destructive rapid polishing process of plasma.Xi'an Technological University2014
    [Google Scholar]
  16. MaPengfei Research on modified polishing technology of Ultra-smooth optical Elements by ion beam deposition.Xi'an Technological University2014
    [Google Scholar]
  17. JiaH.P. Analysis of magnetothermal coupling characteristics of plasma arc and study on mechanism of polishing jade.Henan University of Technology2014
    [Google Scholar]
  18. JiS.H. Theoretical and experimental study on plasma repair of subsurface damage of optical components.Changchun University of Science and Technology2014
    [Google Scholar]
  19. YuX. Research on key techniques of surface shape error correction in ultrasonic magnetorheological composite polishing.Harbin Institute of Technology2014
    [Google Scholar]
  20. WeiD. Research on quantitative removal of atmospheric plasma processing technology.Harbin Institute of Technology2013
    [Google Scholar]
  21. LiuR.L. Preparation of nanographene by plasma vapor deposition and its properties.National University of Defense Technology2013
    [Google Scholar]
  22. XinP. ZhibinM.A. JunW. ECR Oxygen Plasma Etched CVD diamond Film Plasma Science and Technology Committee of Chinese Mechanics Society, Plasma Physics Branch of Chinese Physical Society, Nuclear Fusion and Plasma Physics Society of China. Summary of the 16th National Plasma Science and Technology Conference and the first National Plasma Medical Seminar, Hubei Key Laboratory of Plasma Chemistry and New Materials, School of Materials Science and Engineering, Wuhan Institute of Technology2023
    [Google Scholar]
  23. XueH. Study on process parameters and test equipment of electrolyte-plasma polishing of aluminum alloy.Harbin Institute of Technology2013
    [Google Scholar]
  24. JiangJ. Research on inductively coupled plasma jet machining technology of Silicon-based Materials.Harbin Institute of Technology2013
    [Google Scholar]
  25. QiangH. Research on back-polished and Passivated polycrystalline silicon solar cells.Beijing Jiaotong University2013
    [Google Scholar]
  26. DuanG. Research on removal characteristics of ion beam polishing .Graduate School of Chinese Academy of Sciences Institute of Optoelectronic Technology2013
    [Google Scholar]
  27. JiW. Research on electrolyte plasma polishing of metal surface and its technology.Harbin Institute of Technology2013
    [Google Scholar]
  28. Ze-KaiDu. Study on preparation, mechanism and laser Raman characterization of graphene and its composite structures by plasma technology.Nanchang University2013
    [Google Scholar]
  29. WangDongfang Research on atmospheric plasma processing of fused quartz.J. Shaanxi Univ. Technol201329215
    [Google Scholar]
  30. YuanJ. ZheW. LuB. Research status of ultra-precision polishing of aspherical surface.Jixie Gongcheng Xuebao2012482316717710.3901/JME.2012.23.167
    [Google Scholar]
  31. LiuWeiguo WangXuechun YingxueHUI Jet plasma process parameters on the polishing effect of physics .J. Xi'an Univ. Technol2012320860360710.16185/j.jxatu.edu.cn.2012.08.009
    [Google Scholar]
  32. HuangZ. Research on electrolyte-plasma polishing method of Copper alloy.Harbin Institute of Technology2012
    [Google Scholar]
  33. ShenW. Research on magnetoelectric heating of microwave ECR plasma.Wuhan Institute of Technology2012
    [Google Scholar]
  34. ShanW. Research on laser etching and polishing of quartz glass.Huazhong University of Science and Technology2012
    [Google Scholar]
  35. WangD. Study on some influencing factors of the process of atmospheric plasma processing fused quartz materials.Harbin Institute of Technology2011
    [Google Scholar]
  36. YangY. Research on numerical control method of atmospheric plasma machining.Harbin Institute of Technology2011
    [Google Scholar]
  37. ZhangD. Study on the role of electrolyte in electrolyte-plasma machining.Harbin Institute of Technology2011
    [Google Scholar]
  38. HouDehai ZhengLuo WangYonggang New progress of ultra smooth surface polishing technology .J. Man. Missiles20115808410.16338/j.iSSN.1009‑1319.2011.05.002
    [Google Scholar]
  39. WuYilong Study on plasma polishing mechanism.Xi'an Technological University2011
    [Google Scholar]
  40. HaoS. YangH. LongB. ReaxFF molecular dynamics simulation of single-crystalline silicon plasma polishing and subsurface damage removal.Comput. Mater. Sci.20242024233112685
    [Google Scholar]
  41. BoW. JinH. NaL. Large-area planar optical parts processing device and processing method.C.N. Patent. 102744652B2015.
    [Google Scholar]
  42. JiafuW.A.N.G. BoW. ZhangJ. Design of atmospheric plasma polishing System for SiC ultra-smooth Surface Machining.Aeronautical Precision Manufacturing Technology2008041114
    [Google Scholar]
  43. YukuiCAI ZhangYecheng SunShihai A liquid plasma polishing device for Metal wire and its working method.C.N. Patent. 116892053A2023.
    [Google Scholar]
  44. Singh YadavH.N. KrishnaE. KombathS. DevD.S.D. DasM. Investigation of MRR and surface characterization using plasma process.Mater. Manuf. Process.202338131716172810.1080/10426914.2023.2176873
    [Google Scholar]
  45. XinchengY. YouliangW. JianhuiL. Micro-arc plasma discharge polishing for multi-material parts.J. Phys. Conf. Ser.202325781
    [Google Scholar]
  46. YadavH.N.S. KumarM. KumarA. DasM. Plasma polishing processes applied on optical materials: A review.Journal of Micromanufacturing202361273910.1177/25165984211038882
    [Google Scholar]
  47. ZhiweiL LincongL DongxinL Plasma polishing as a new polishing option to reduce the surface roughness of porous titanium alloy for 3D printing.JoVE2023
    [Google Scholar]
  48. Singh YadavH.N. DasM. Parametric optimisation of plasma polishing process using response surface methodology.Surf. Eng.202339220421710.1080/02670844.2023.2206183
    [Google Scholar]
  49. KusmanovS. TambovskiyI. SilkinS. NikiforovR. BelovR. Increasing the hardness and corrosion resistance of the surface of CP-Ti by plasma electrolytic nitrocarburising and polishing.Materials20231631102110210.3390/ma1603110236770108
    [Google Scholar]
  50. SchornL. WilkatM. LommenJ. BorelliM. MuhammadS. RanaM. Plasma electrolytic polished patient-specific orbital implants in clinical use—A technical note.J. Pers. Med.202313114814810.3390/jpm1301014836675809
    [Google Scholar]
  51. YangjianC. JunY. ZongweiW. Experimental study on ultrasonic-assisted electrolyte plasma polishing of SUS304 stainless steel.Int. J. Adv. Manuf. Technol.20221247-828352846
    [Google Scholar]
  52. DuanH. SunH. JiG. YangD. LiS. WangJ. XiangY. Biological corrosion resistance and osteoblast response of 316LVM polished using electrolytic plasma.Coatings202212111672167210.3390/coatings12111672
    [Google Scholar]
  53. WuY. WangL. ZhaoJ. ZhangC. Spray electrolyte plasma polishing of GH3536 superalloy manufactured by selective laser melting.Int. J. Adv. Manuf. Technol.20221237-82669267810.1007/s00170‑022‑10283‑3
    [Google Scholar]
  54. MuratovK.R. GashevE.A. AblyazT.R. Recommendations for electrolytic plasma polishing of chromium and titanium alloys.Russ. Eng. Res.202242882983110.3103/S1068798X22080172
    [Google Scholar]
  55. GangqiangJ. HuanwuS. HaidongD. Enhancement of corrosion resistance for medical grade 316l stainless steel by electrolytic plasma polishing.J. Mater. Eng. Perform.202232414981507
    [Google Scholar]
  56. TazmeevBK. Justification of the choice of the optimal design of equipment for electrolyte-plasma polishing.J. Phys. Conf. Ser.202222701
    [Google Scholar]
  57. TiantianD. JianjunL. ZhizhenZ. Influence of plasma beam polishing process parameters on surface roughness of AISI 304 stainless steel.Appl. Surf. Sci.2022
    [Google Scholar]
  58. YutingZ YanweiJ JinlongL Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties.Vacuum2022110932
    [Google Scholar]
  59. ZhouC. SuH. QianN. ZhangZ. XuJ. Characteristics and function of vapour gaseous envelope fluctuation in plasma electrolytic polishing.Int. J. Adv. Manuf. Technol.202211911-1278157825..10.1007/s00170‑021‑08606‑x
    [Google Scholar]
  60. ThomasA. GeorgB. HeikeM. Plasma jet assisted polishing of fused silica freeform optics.EPJ Web Conf.202226603001
    [Google Scholar]
  61. AlexanderK. MathieuG. ThomasN. Jet application of plasma electrolyte polishing.Procedia CIRP2022113525113529
    [Google Scholar]
  62. KorolyovA. BubulisA. VėžysJ. AliakseyeuY. MinchenyaV. NissV. MarkinD. Electrolytic plasma polishing of NiTi alloy.Mathematical Models in Engineering202174708010.21595/mme.2021.22351
    [Google Scholar]
  63. NavickaitėK. IannicielloL. TušekJ. EngelbrechtK. BahlC.R.H. PenzelM. NestlerK. Böttger-HillerF. ZeidlerH. Plasma electrolytic polishing of nitinol: Investigation of functional properties.Materials202114216450645010.3390/ma1421645034771978
    [Google Scholar]
  64. ChenM. WangH. JianC. Research progress on detection and suppression of subsurface Defects in fused Quartz optical Components.Chin. J. Mech. Eng.20215720119..10.3901/JME.2021.20.001
    [Google Scholar]
  65. AjayR DebajyotiD . Effect of HF wet-etching and Hsub2/sub-plasma polishing on the low-temperature growth of carbon nanotubes on stainless-steel substrates.J. Phys. Chem. Solids20212021110307
    [Google Scholar]
  66. JikunY. Research on surface integrity manufacturing of bearing ring raceway based on plasma polishing principle.J. Phys. Conf. Ser.202119924
    [Google Scholar]
  67. DonglianH. XianxingJ. NannanL. Surface plasmon resonance sensor based on double-sided polished microstructured optical fiber with hollow core.IEEE Photonics J.2021134
    [Google Scholar]
  68. GangqiangJ. HuanwuS. HaidongD. Effect of electrolytic plasma polishing on microstructural evolution and tensile properties of 316L stainless steel.Surf. Coat. Tech.2021420
    [Google Scholar]
  69. MaG. LiS. LiuX. YinX. JiaZ. LiuF. Combination of plasma electrolytic processing and mechanical polishing for single-crystal 4H-SiC.Micromachines202112660660610.3390/mi1206060634071144
    [Google Scholar]
  70. RongyanS. AtsunoriN. JunjiN. Novel highly-efficient and dress-free polishing technique with plasma-assisted surface modification and dressing.Precision Engineering20217222423610.1016/j.precisioneng.2021.05.003
    [Google Scholar]
  71. TazmeevB.K. TsybuleveskyV.V. TazmeevG.K. In search of optimal mode of plasma polishing of surface of agricultural machinery parts when using a discharge with liquid cathode.J. Phys. Conf. Ser.202118701
    [Google Scholar]
  72. RozalinaZ. MardhiahN.Z. SaufiA.M F A. High sensitivity refractive index sensor in long-range surface plasmon resonance based on side polished optical fiber.Opt. Fiber Technol.202161
    [Google Scholar]
  73. SinghN.H.Y. ManjeshK. AbhinavK. COMSOL simulation of microwave plasma polishing on different surfaces.Mater. Today Proc.202145P648034809
    [Google Scholar]
  74. XingSu Study on combined process of atmospheric plasma processing and air bag polishing of continuous phase plate .Harbin Institute of Technology202010.27061/,dcnki.Ghgdu.2020.001532
    [Google Scholar]
  75. QiangX. Study on characteristics of atmospheric inductively coupled plasma jets and evolution mechanism of machined surfaces.Harbin Institute of Technology2017
    [Google Scholar]
  76. WangW. Research on nano-colloid cavitation jet polishing and its key Technologies.Harbin Institute of Technology2014
    [Google Scholar]
  77. Design of inductively coupled plasma polishing system for high intensity laser optical parts.Harbin Institute of Technology2014
    [Google Scholar]
  78. Hui-liangK. Study on surface formation mechanism during removal of damaged layer of fused quartz by atmospheric plasma.Harbin Institute of Technology2014
    [Google Scholar]
  79. WangJ. Study on electrolyte plasma polishing of metal surface and its technology.Harbin Institute of Technology2013
    [Google Scholar]
  80. WangD. Research on Some influencing factors of atmospheric plasma processing of fused quartz materials.Harbin Institute of Technology2011
    [Google Scholar]
  81. ZHAO Peijun, Wang Bo, Lu Lihua et al. Aero precision manufacturing technology, 2010, 46(01): 9-11+19.
  82. ZhaoP. Study on removal velocity function of atmospheric plasma polishing at room temperature.Harbin Institute of Technology2009
    [Google Scholar]
  83. BoW. ZhangJ. ShenD. Application of atomic emission spectrometry in the study of atmospheric plasma polishing process.Guangpuxue Yu Guangpu Fenxi20080716411644
    [Google Scholar]
  84. ZhangJ. BoW. ShenD. Design of atmospheric pressure low temperature plasma polishing system for ultra-smooth surface Machining.Nanotechnology and Precision Engineering200803222226
    [Google Scholar]
  85. ZhangJ. BoW. ShenD. New progress in machining methods for ultra-smooth surfaces.Opt. Technol.2007S1150154
    [Google Scholar]
  86. BoW. JufanZ. ShenD. Atmospheric pressure plasma polishing method.C.N. Patent. 100462199C2009.
    [Google Scholar]
  87. BoW. XingS. PengZ. A fire polishing assisted inductively coupled plasma processing method.C.N. Patent. 104950355B2016.
    [Google Scholar]
  88. QiangS. ChenG. LeiH. Non-equilibrium liquid composite pulsed plasma polishing method.C.N. Patent. 101173361B2010.
    [Google Scholar]
  89. SunH. YangD. LiS. A kind of electrolyte plasma polishing method for titanium alloy femur stem prosthesis.C.N. Patent. 113564683A2021.
    [Google Scholar]
  90. ShenX. TuQ. HeX. Atmospheric plasma polishing system.C.N. Patent. 206967172U2018.
    [Google Scholar]
  91. JufanZ. BoW. ZhangL. Capacitance-coupled RF atmospheric pressure plasma torch for ultra-smooth surface machining.C.N. Patent. 29179292007.
    [Google Scholar]
  92. FengG.H. Kun-PengH. ChenW.Y. A multi-stage electrolytic plasma polishing system.C.N. Patent. 214168138U2021.
    [Google Scholar]
  93. WangJ. Design and Experimental study of atmospheric plasma polishing system.Harbin Institute of Technology2008
    [Google Scholar]
  94. BoW. JinH. YaoY. Atmospheric plasma processing device for large aperture aspheric optical parts.C.N. Patent. 103227093A2013.
    [Google Scholar]
  95. BoW. NaL. YaoY. Atmospheric plasma NC Machining Method for free-form Surface Optical Parts.C.N. Patent.103273180B2015.
    [Google Scholar]
  96. BoW. ZhangJ. WangL. Atmospheric pressure plasma polishing device.C.N. Patent. 100406197C2008.
    [Google Scholar]
  97. BoW. XingS. PengZ. A kind of inductively coupled plasma processing device assisted by fire polishing.C.N. Patent. 104916519B2017.
    [Google Scholar]
  98. LiJ. DengT. ZhengZ. A device and method for micro-beam plasma polishing of metal surface.C.N. Patent. 109366255A2019.
    [Google Scholar]
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  • Article Type:
    Review Article
Keyword(s): atmospheric plasma; nanoscale; Plasma; polishing; ultra-precision machining; X-ray
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