Strategies for Improving Thin-Film Transistor Reliability
- Authors: Meng Zhang1, Mingxiang Wang2
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View Affiliations Hide Affiliations1 College of Electronics and Information Engineering, Shenzhen University, Shenzhen, China 2 Department of Microelectronics Soochow University Suzhou 215006, China
- Source: Thin-Film Transistor Reliability , pp 281-332
- Publication Date: April 2025
- Language: English
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This chapter presents strategies for enhancing the reliability of thin-film transistors (TFTs), discussing the implementation of special structures and other improvement methods. This chapter focuses on the reliability improvement of polysilicon TFT in lightly doped drain (LDD) and bridge-grain (BG) structures. The method to improve the reliability of metal oxide TFT is also described, such as the elevated-metal metal oxide (EMMO) structure.
Hardbound ISBN:
9789815322620
Ebook ISBN:
9789815322613
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