Simple Treatment of Transient Enhanced Diffusion
- By Kunihiro Suzuki1
-
View Affiliations Hide Affiliations1 Fujitsu limited Minatoku kaigan 1 11-1 Tokyo, Japan.
- Source: Ion Implantation and Activation: Volume 3 , pp 83-100
- Publication Date: November 2013
- Language: English
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A two-stream model which describes impurity flux and point defect flux independently has been proposed. Equation for point defect flux gives macroscopic information about the impurity flux equation, such as enhanced diffusion coefficient and time duration of TED. The model also accommodates the ramp up process where enhanced diffusion and time duration parameters become variable. This simple model can be controlled and tuned simply and gives us prominent features of TED.
Hardbound ISBN:
9781608057931
Ebook ISBN:
9781608057924
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