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- Authors: Filipe Vaz1, Nicolas Martin2, Martin Fenker3
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View Affiliations Hide Affiliations1 Minho University, Portugal 2 National Engineering School ENSMM, France 3 FEM Forschungsinstitut Edelmetalle 8 Metallchemie, Germany
- Source: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications , pp viii-xi
- Publication Date: June 2013
- Language: English
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