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- By Allan Matthews1
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View Affiliations Hide Affiliations1 Surface Engineering, Department of Materials Science and Engineering, University of Sheffield, Sheffield, UK
- Source: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications , pp iv-iv
- Publication Date: June 2013
- Language: English
Hardbound ISBN:
9781608051571
Ebook ISBN:
9781608051564
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