Paring Diffusion Equation
- By Kunihiro Suzuki1
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View Affiliations Hide Affiliations1 Fujitsu limited Minatoku kaigan 1 11-1 Tokyo, Japan.
- Source: Ion Implantation and Activation: Volume 3 , pp 35-55
- Publication Date: November 2013
- Language: English
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In this section, we consider reaction between impurity, point defects, and charges in diffusion phenomenon and diffusion equations for both of impurity and point defects. There are many levels of sophistication of treatment of the interaction of impurity and point defects. We perform approximations step by step, and derive diffusion models in various supplication levels.
Hardbound ISBN:
9781608057931
Ebook ISBN:
9781608057924
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