Lateral Distribution
- By Kunihiro Suzuki1
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View Affiliations Hide Affiliations1 Fujitsu limited Minatoku kaigan 1 11-1 Tokyo, Japan.
- Source: Ion Implantation and Activation: Volume 1 , pp 266-301
- Publication Date: October 2013
- Language: English
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An analytical model with lateral straggling parameters was developed to describe the tilt dependence of ion-implantation profiles. There are three parameters associated with depth-dependent lateral straggling into the model. On the basis of comparison between experimental and analytical data, a database of ion-implantation profiles that includes lateral-straggling parameters have established. The data with tilt 0° were evaluated using off angle substrates.
Hardbound ISBN:
9781608057825
Ebook ISBN:
9781608057818
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